4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Terushige Takeyama

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Magnetic carrying device

Conveyors: power-driven – Conveyor section – Load propelled as the reactive means in a linear motor or...
Reexamination Certificate

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Sputtering device

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Substrate support mechanism and substrate rotation device

Coating apparatus – Work holders – or handling devices
Reexamination Certificate

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Substrate transfer apparatus of substrate processing system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2155392

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