4. Brushing, scrubbing, and general cleaning
  5. Machines
  6. Brushing

Takashi Tanakajima

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Automatic cleaning apparatus for wafers

Brushing – scrubbing – and general cleaning – Machines – Brushing
Patent

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Method for handling or processing semiconductor wafers

Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
Patent

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Profile ID: LFUS-PAI-P-992252

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