Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
Inventor
active
Electrostatic alignment of a charged particle beam
Multiple beam electron beam lithography system
No associations
LandOfFree
Tai-Hon P Chang does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Tai-Hon P Chang, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Tai-Hon P Chang will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-2092504