4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Ion implantation of dopant into semiconductor region

Tae Whan Kim

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Fabrication method of nanocrystals using a focused-ion beam

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Method of formation for quantum dots array using tilted...

Semiconductor device manufacturing: process – Quantum dots and lines
Reexamination Certificate

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