4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. Utilizing a spectrometer

Susan M. Gaspar

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Diffracted light from latent images in photoresist for exposure

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Simple CD measurement of periodic structures on photomasks

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
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Profile ID: LFUS-PAI-P-1290005

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