4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. Utilizing a spectrometer

Super Silicon Crystal Research Institute Corporation

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Optical apparatus for measuring profiles of a wafer

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
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Optical instrument for measuring shape of wafer

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Single crystal pull-up apparatus and single crystal pull-up...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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Slurry useful for wire-saw slicing and evaluation of slurry

Measuring and testing – Liquid analysis or analysis of the suspension of solids in a... – Viscosity
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