Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Junction field effect transistor
Inventor
active
Controllable oxidation technique for high quality ultrathin...
Controllable oxidation technique for the formation of...
Method for annealing ultra-thin, high quality gate oxide...
Method for uniform nitridization of ultra-thin silicon...
Method of ammonia annealing of ultra-thin silicon dioxide...
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