4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Sung Weon Lee

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Apparatus for generating inductively coupled plasma

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Cluster tool for fabricating semiconductor device

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Parallel resonance whirl antenna

Communications: radio wave antennas – Antennas – Spiral or helical type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2607403

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