4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Sughrue Mion Zinn MacPeak & Seas LLP.

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Apparatus and method for examining specimen with a charged...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Column for charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Data converter apparatus and method particularly useful for...

Image analysis – Applications – Manufacturing or product inspection
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Method and system for reticle inspection by photolithography...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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