4. Valves and valve actuation
  5. Electrically actuated valve
  6. Having element dimensionally responsive to field

Stefan Kluge

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Method for determining internal pressure of a vehicle tire

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Reexamination Certificate

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Method for producing a micromembrane pump body

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Micromembrane pump

Pumps – Processes
Reexamination Certificate

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Piezoelectrically actuated microvalve

Valves and valve actuation – Electrically actuated valve – Having element dimensionally responsive to field
Patent

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Piezoelectrically actuated microvalve

Valves and valve actuation – Electrically actuated valve – Having element dimensionally responsive to field
Patent

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Profile ID: LFUS-PAI-P-688364

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