4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

STEAG RTP Systems GmbH

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Device and method for thermally treating substrates

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Method and device for calibrating measurements of...

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Reexamination Certificate

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