4. Dispensing
  5. With discharge assistant
  6. Container with follower

STEAG MicroTech GmbH

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Corporate Assignee

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Apparatus and method for processing substrates

Coating processes – With cutting – holding – severing – or abrading the base
Reexamination Certificate

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Bellows-type dispensing pump

Dispensing – With discharge assistant – Container with follower
Reexamination Certificate

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Method and device for treating substrates

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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