4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Stallman & Pollock

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Detector array with scattered light correction

Optics: measuring and testing – By dispersed light spectroscopy – With background radiation comparison
Reexamination Certificate

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Temperature control structure for integrated circuit

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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