4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Simplus Systems Corporation

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High flow conductance and high thermal conductance...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Integrated precursor delivery system

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Liquid delivery system emulsifier

Gas and liquid contact apparatus – With external supply or removal of heat – Heat exchange means at or downstream of contact zone
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Multi-thermal zone shielding apparatus

Coating apparatus – Gas or vapor deposition – With treating means
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Multilayered copper structure for improving adhesion property

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-2063589

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