4. Abrading
  5. Abrading process
  6. Side face of disk

Sidney Huey

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Carrier head for providing a polishing slurry

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Cleaning and slurry distribution system assembly for use in...

Abrading – Machine – Rotary tool
Reexamination Certificate

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CMP platen with patterned surface

Abrading – Machine – Rotary tool
Reexamination Certificate

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CMP platen with patterned surface

Abrading – Machine – Combined
Reexamination Certificate

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Conditioning fixed abrasive articles

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2070527

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