4. Illumination
  5. Light source and modifier
  6. Plural serial lens elements or components

Shuhei Horigome

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Epi-illumination microscope and fluorescence filter set

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Illumination system

Illumination – Light source and modifier – Plural serial lens elements or components
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2040941

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