4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Shoichiro Minomo

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Microwave plasma generator

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Multi-sectional plasma generator with discharge gaps between...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Profile ID: LFUS-PAI-P-2526015

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