4. Abrading
  5. Machine
  6. Rotary tool

Shinzo Uchiyama

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Chemical mechanical polishing apparatus and method

Abrading – Machine – Rotary tool
Reexamination Certificate

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Chemical mechanical polishing apparatus and method

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Conditioning apparatus and conditioning method

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Plasma processing apparatus having permeable window covered...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Polishing apparatus including holder and polishing head with...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2027429

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