4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Shinsuke Asao

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Auxiliary vacuum chamber and vacuum processing unit using same

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Process system with transfer unit for object to be processed

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2058219

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