4. Radiant energy
  5. Invisible radiation responsive nonelectric signalling
  6. Photographic type

Shiaki Murai

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Defect inspection apparatus for phase shift mask

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Electron beam control device

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Pattern drawing apparatus

Radiant energy – Invisible radiation responsive nonelectric signalling – Photographic type
Patent

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Profile ID: LFUS-PAI-P-1769834

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