4. Electrical generator or motor structure
  5. Non-dynamoelectric
  6. Charge accumulating

Seung Bok (Chris) Lee

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Electrostatic actuator for microelectromechanical systems...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Electrostatic actuator for micromechanical systems

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2794866

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