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- Semiconductor device manufacturing: process
- Formation of electrically isolated lateral semiconductive...
- Recessed oxide by localized oxidation
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Senthil K. Arthanari
Senthil K.
Arthanari
- Patent Class
Semiconductor device manufacturing: process
- SubClass
Formation of electrically isolated lateral semiconductive...
- SubSubClass
Recessed oxide by localized oxidation
- Specialty
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- Status
active
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Profile ID: LFUS-PAI-P-2581863
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