4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Semitool. Inc.

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Apparatus and methods for processing a workpiece

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method for filling recessed micro-structures with...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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