4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Sang-Tae Ko

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Chemical vapor deposition method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Chemical vapor deposition system

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2520545

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