4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material

Sandeep A. Desai

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Reduced fluorine contamination for tungsten CVD

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Silicon layer to improve plug filling by CVD

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate

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Silicon layer to improve plug filling by CVD

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2136636

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