4. Machines not elsewhere specified
  5. Heat treatment, welding or brazing
  6. Scientific, laboratory, or industrial heating equipment

SAL, Inc.

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Method of improving x-ray lithography in the sub 100nm range...

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Vertical stepper stage apparatus

Machines not elsewhere specified – Heat treatment – welding or brazing – Scientific – laboratory – or industrial heating equipment
Design Patent

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