4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Ruey Horng Lin

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Apparatus and method for controlling temperature of a chamber

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Electrostatic chuck apparatus and method for efficiently...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2073171

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