4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus

Ronald O. Russell

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Chemical vapor deposition system for polycrystalline silicon...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Chemical vapor deposition system for polycrystalline silicon...

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Reexamination Certificate

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Chemical vapor deposition system for polycrystalline silicon...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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