4. Gas separation: processes
  5. Electric or electrostatic field
  6. And nonelectrical separation of fluid mixture

Roman Mostovoy

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Method and apparatus for reducing target arcing during...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method for reducing particle concentration within a...

Gas separation: processes – Electric or electrostatic field – And nonelectrical separation of fluid mixture
Reexamination Certificate

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Preventing defect generation from targets through applying...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2453554

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