4. Coating apparatus
  5. Gas or vapor deposition

Roger Sillmon

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Gas collector for epitaxial reactor

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas collector for providing an even flow of gasses through a...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Rigid gas collector for providing an even flow of gasses

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2642380

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