4. Coating apparatus
  5. Work holders, or handling devices

Rodney C. Ow

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Modular frame for a wafer fabrication system

Material or article handling – Associated with semiconductor wafer handling – Including wafer charging or discharging means for vacuum...
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Wafer carrier adapter and method for use thereof

Coating apparatus – Work holders – or handling devices
Patent

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Profile ID: LFUS-PAI-P-1154887

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