4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Robert Stern

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Adjusting DC bias voltage in plasma chamber

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Distributed inductively-coupled plasma source

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Distributed inductively-coupled plasma source and circuit...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Photoresist coater

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2042875

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