4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Robert S. Busacca

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Method and apparatus for enhancing a sputtering...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Robotic station for capturing both image and weight of a sample

Data processing: generic control systems or specific application – Specific application – apparatus or process – Robot control
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Profile ID: LFUS-PAI-P-2460979

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