4. Material or article handling
  5. Apparatus for charging a load holding or supporting element...
  6. Transporting means carries load to at least one of a...

Robert Otwell

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3 point vacuum chuck with non-resilient support members

Work holders – With fluid means – Vacuum-type holding means
Reexamination Certificate

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Wafer aligner in center of front end frame of vacuum system

Material or article handling – Apparatus for charging a load holding or supporting element... – Transporting means carries load to at least one of a...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2064371

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