4. Optical: systems and elements
  5. Deflection using a moving element
  6. Using a periodically moving element

Robert M. Robertson

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Dual frequency excitation of plasma for film deposition

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Fiber optic sensor

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Patent

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Film deposition using a finger type shadow frame

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Method of depositing amorphous silicon based films having...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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