4. Coating processes
  5. Centrifugal force utilized

Robert D. Mohondro

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Method and apparatus for applying a layer of a fluid material on

Coating processes – Centrifugal force utilized
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Process for reducing edge roughness in patterned photoresist

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Process for reducing edge roughness in patterned photoresist

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Including heating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1936911

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