4. Wave transmission lines and networks
  5. Coupling networks
  6. With impedance matching

Robert D. Greenway

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Chamber having improved gas feed-through and method

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Impedance matching network

Wave transmission lines and networks – Coupling networks – With impedance matching
Patent

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Substrate support with gas feed-through and method

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1513394

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