4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Ricky Ruffin

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Method for detecting an endpoint for an oxygen free plasma...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Oxygen free plasma stripping process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Oxygen free plasma stripping process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2082482

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