4. Radiant energy
  5. Irradiation of objects or material

Richard P. Torti

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Detector and method for cluster ion beam diagnostics

Radiant energy – Ionic separation or analysis – With sample supply means
Reexamination Certificate

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Gas cluster ion beam low mass ion filter

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Gas cluster ion beam size diagnostics and workpiece processing

Radiant energy – Ionic separation or analysis – Ion beam pulsing means with detector synchronizing means
Reexamination Certificate

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Gas cluster ion beam smoother apparatus

Radiant energy – Irradiation of objects or material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2549473

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