4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Richard Mett

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Apparatus and method for controlling plasma uniformity in a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and apparatus for minimizing plasma destabilization...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Profile ID: LFUS-PAI-P-2060110

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