4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Richard Beanland

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Alignment diffractometer

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
Reexamination Certificate

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Method and apparatus for aligning a crystalline substrate

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2884658

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