4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Organic coating applied by vapor, gas, or smoke

Ralph J. Carl

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Method and apparatus for forming low dielectric constant polymer

Coating processes – Coating by vapor – gas – or smoke – Organic coating applied by vapor – gas – or smoke
Patent

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Method and apparatus for forming low dielectric constant...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1843374

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