4. Optics: measuring and testing
  5. By light interference
  6. For dimensional measurement

Rainer Schierle

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Contactless charge measurement of product wafers and control...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Reduced coherence symmetric grazing incidence differential...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Reduced coherence symmetric grazing incidence differential...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2991594

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