4. Radiant energy
  5. Ion generation
  6. Electron bombardment type

Rainer Plontke

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Method and apparatus for forming a curved polyline on a...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method for directing an electron beam onto a target position...

Radiant energy – Ion generation – Electron bombardment type
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Profile ID: LFUS-PAI-P-2639900

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