Corporate Assignee
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
Corporate Assignee
active
No affiliations
Correction device for correcting chromatic aberration in...
Correction device for correcting the lens defects in...
Correction device for correcting the spherical aberration in...
Electrostatic device for correcting chromatic aberration in...
Environmental SEM with a magnetic field for improved...
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