4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Forming from vapor or gaseous state

Petra Alén

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Method for preparing metal nitride thin films

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state
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Process for producing metal thin films by ALD

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Process for producing metal thin films by ALD

Coating processes – Electrical product produced – Metal coating
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