4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Peter Victor Gelzinis

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Deep trench etch on bonded silicon wafer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Integrated circuit with deep trench having multiple slopes

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1628181

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