4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Peter Hoh

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High-density plasma, organic anti-reflective coating etch...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Modified gate processing for optimized definition of array...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Modified gate processing for optimized definition of array...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Semiconductor contact and method of forming the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Profile ID: LFUS-PAI-P-2092057

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