4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Paul K. Shufflebotham

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Apparatus and method for magnetron in-situ cleaning of plasma re

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Predictive wafer temperature control system and method

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1796331

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