4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Paul Comita

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Apparatus and method for surface finishing a silicon film

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Apparatus and method for surface finishing a silicon film

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Bi-directional processing chamber and method for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Lamp array for thermal processing chamber

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2522885

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